JPH0128677Y2 - - Google Patents
Info
- Publication number
- JPH0128677Y2 JPH0128677Y2 JP11629986U JP11629986U JPH0128677Y2 JP H0128677 Y2 JPH0128677 Y2 JP H0128677Y2 JP 11629986 U JP11629986 U JP 11629986U JP 11629986 U JP11629986 U JP 11629986U JP H0128677 Y2 JPH0128677 Y2 JP H0128677Y2
- Authority
- JP
- Japan
- Prior art keywords
- container
- liquid
- chemical solution
- tank
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 71
- 235000012431 wafers Nutrition 0.000 claims description 54
- 239000000126 substance Substances 0.000 claims description 51
- 239000004065 semiconductor Substances 0.000 claims description 26
- 238000011084 recovery Methods 0.000 claims description 20
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 239000011295 pitch Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 15
- 238000005530 etching Methods 0.000 description 11
- 238000004140 cleaning Methods 0.000 description 9
- 238000003860 storage Methods 0.000 description 7
- 238000001914 filtration Methods 0.000 description 3
- 230000007723 transport mechanism Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11629986U JPH0128677Y2 (en]) | 1986-07-29 | 1986-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11629986U JPH0128677Y2 (en]) | 1986-07-29 | 1986-07-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6322732U JPS6322732U (en]) | 1988-02-15 |
| JPH0128677Y2 true JPH0128677Y2 (en]) | 1989-08-31 |
Family
ID=31000758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11629986U Expired JPH0128677Y2 (en]) | 1986-07-29 | 1986-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0128677Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5911682B2 (ja) * | 2011-08-30 | 2016-04-27 | 株式会社Ｓｃｒｅｅｎホールディングス | 槽キャリア及び基板処理装置 |
-
1986
- 1986-07-29 JP JP11629986U patent/JPH0128677Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6322732U (en]) | 1988-02-15 |
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